Title :
Piezoelectric hydrogen sensor on the base of WO3-Pd films
Author :
Ges, I.A. ; Budkevich, B.A.
Author_Institution :
Inst. of Electron., Acad. of Sci., Minsk, Byelorussia
Abstract :
Questions of hydrogen piezoelectric sensor fabrication are considered in this work. The method of metallic palladium precipitation, based on colour centres transformation is proposed. The palladium film possessed a developed surface and served as a basis for the hydrogen sensor of piezoelectric type on the base of the thin-film structure WO 3/Pd-quartz crystal. The influence of sensor initial loading with sensitive covering on its steady-state characteristics is explored. Hydrogen concentration limits of sensor use are determined. The obtained results confirm the efficiency of the proposed method of palladium precipitation when making the sensitive layer of hydrogen sensor
Keywords :
catalysts; colour centres; crystal resonators; electrochromic devices; gas sensors; microbalances; palladium; precipitation (physical chemistry); tungsten compounds; H; Pd; SiO2; WO3-Pd; WO3/Pd-quartz thin film structure; catalytic metal grains; colour centres transformation; electrochromic film; gas sensor; hydrogen concentration limits; palladium precipitation; piezoelectric hydrogen sensor; steady-state characteristics; Chemical sensors; Crystalline materials; Electrochromism; Hydrogen; Optical films; Palladium; Piezoelectric films; Sensor phenomena and characterization; Solids; Thin film sensors;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.841490
