Title :
Methods of harmful effects limitation in SAW gas sensors
Author :
Hechner, Judyta ; Soluch, Waldemar ; Wróbel, Tadeusz
Author_Institution :
Inst. of Electron. Mater. Technol., Warsaw, Poland
Abstract :
In this paper some problems concerning work stability of SAW NO 2 sensors employing copper phthalocyanine (PcCu) as the chemical interface and 128° YX lithium niobate as substrate are presented. The proposed sensing element consists of two delay lines: one of them is covered with a chemical coating (PcCu), the another is covered with Al and then PcCu. In this case a response of the sensor depends only on the conductivity changes of the PcCu layer during NO2 exposure. Other effects are identical and therefore are cancelled
Keywords :
adsorption; gas sensors; nitrogen compounds; surface acoustic wave delay lines; surface acoustic wave sensors; NO2; SAW gas sensors; YX cut lithium niobate; chemical coating; chemical interface; conductivity changes; copper phthalocyanine; delay lines; harmful effects limitation; phase drift stability; reproducibility; sensor response; work stability; Chemical elements; Chemical sensors; Coatings; Conductivity; Copper; Delay lines; Gas detectors; Lithium niobate; Stability; Surface acoustic waves;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.841495
