A new type of atomic force microscope with multi-scanners

In order to expand the application of AFM, a new type of atomic force microscope (AFM) with multi-scanners is developed. Unlike conventional single-scanner AFM, this system owns sample-scan mode with tube-piezo scanner, tip-scan mode with stack-piezo scanner, and the combined mode with piezo feedback and step motor scanner. With these scanners, the AFM is suitable not only for high resolution imaging of small sample, but also for the detection of large-sized samples. Therefore, it provides at least three different scanning forms to meet the various needs of different samples. The scan ranges can reach 4 μm × 4 μm, 20 μm × 20 μm, and 40 μm × 40 μm, respectively. Experiments have been carried out showing that the multi-scanner AFM is of reliable stability, high resolution, as well as wide scan range. It can be widely applied in the fields of micro and nanotechnology.