• DocumentCode
    1989418
  • Title

    First-principle investigation of Ti wetting layer influence on metal-graphene contact

  • Author

    Xiang Ji ; Yan Wang ; Zhiping Yu

  • Author_Institution
    Inst. of Microelectron., Tsinghua Univ., Beijing, China
  • fYear
    2013
  • fDate
    3-5 Sept. 2013
  • Firstpage
    392
  • Lastpage
    395
  • Abstract
    Metal (M) /grapheme (Gr) contact has attracted much attention since the contact resistance (Rc) between Gr and metal electrode is crucially important for achieving high performance of grapheme-based devices [[1]-[15]]. Published experimental works on metal/graphene contacts generally adopted Gr/Ti/Metal structure to enhance the interfacial adhesion [[1]-[8]]. However, how the presence of Ti wetting layer can influence the global response of Gr-based device remains unclear. To present a clear physical understanding and optimizing transport between metal electrodes and graphene with Ti wetting layer, the binding energy, band structure, interface potential profile and contact resistance of the Gr/Ti/Metal (Al, Cu, Au, Pt, Pd) systems were studied for the first time by first-principle and NEGF methods in this paper. The results provide insights into contact resistance optimization and the ultimate scalability of graphene-based devices.
  • Keywords
    binding energy; contact resistance; electrodes; graphene; titanium compounds; Ti; band structure; binding energy; contact resistance; first-principle investigation; interface potential profile; interfacial adhesion; metal electrode; metal-graphene contact; wetting layer influence; Chemicals; Contact resistance; Electric potential; Gold; Graphene; Lattices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices (SISPAD), 2013 International Conference on
  • Conference_Location
    Glasgow
  • ISSN
    1946-1569
  • Print_ISBN
    978-1-4673-5733-3
  • Type

    conf

  • DOI
    10.1109/SISPAD.2013.6650657
  • Filename
    6650657