DocumentCode
1990344
Title
Optical fibre array manufacture using electrostatic actuation
Author
Weiland, Dominik ; Luetzelschwab, Markus ; Abraham, Eitan ; Desmulliez, Marc P Y ; Molter, Peter ; Giro, Florian ; Saumer, Monika
Author_Institution
Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh, UK
fYear
2010
fDate
Feb. 28 2010-March 2 2010
Firstpage
92
Lastpage
97
Abstract
A novel method to manufacture two-dimensional bundles of single mode optical fibres at sub-micron pitch accuracy is presented. An array of holes, each surrounded by four electrodes has been produced using the UV-LIGA process. Electrostatic fields between the electrodes and a metal coated optical single mode fibre inserted into such a hole, are used to position the fibre. The position of the fibre core can be monitored and moved to its ideal position. Using thermal or UV activation a cement filling the hole around the fibre is cured to fix the fibre in place.
Keywords
LIGA; metals; optical arrays; optical fibre fabrication; ultraviolet lithography; UV activation; UV-LIGA process; cement; electrostatic actuation; fibre core; metal coated optical single mode fibre; optical fibre array manufacture; single mode optical fibres; submicron pitch accuracy; thermal activation; two-dimensional bundles; Electrostatic actuators; Manufacturing; Optical arrays; Optical fibers; Solid state circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Packaging Materials: Microtech, 2010. APM '10. International Symposium on
Conference_Location
Cambridge
Print_ISBN
978-1-4244-6756-3
Type
conf
DOI
10.1109/ISAPM.2010.5441376
Filename
5441376
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