• DocumentCode
    1990344
  • Title

    Optical fibre array manufacture using electrostatic actuation

  • Author

    Weiland, Dominik ; Luetzelschwab, Markus ; Abraham, Eitan ; Desmulliez, Marc P Y ; Molter, Peter ; Giro, Florian ; Saumer, Monika

  • Author_Institution
    Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh, UK
  • fYear
    2010
  • fDate
    Feb. 28 2010-March 2 2010
  • Firstpage
    92
  • Lastpage
    97
  • Abstract
    A novel method to manufacture two-dimensional bundles of single mode optical fibres at sub-micron pitch accuracy is presented. An array of holes, each surrounded by four electrodes has been produced using the UV-LIGA process. Electrostatic fields between the electrodes and a metal coated optical single mode fibre inserted into such a hole, are used to position the fibre. The position of the fibre core can be monitored and moved to its ideal position. Using thermal or UV activation a cement filling the hole around the fibre is cured to fix the fibre in place.
  • Keywords
    LIGA; metals; optical arrays; optical fibre fabrication; ultraviolet lithography; UV activation; UV-LIGA process; cement; electrostatic actuation; fibre core; metal coated optical single mode fibre; optical fibre array manufacture; single mode optical fibres; submicron pitch accuracy; thermal activation; two-dimensional bundles; Electrostatic actuators; Manufacturing; Optical arrays; Optical fibers; Solid state circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Packaging Materials: Microtech, 2010. APM '10. International Symposium on
  • Conference_Location
    Cambridge
  • Print_ISBN
    978-1-4244-6756-3
  • Type

    conf

  • DOI
    10.1109/ISAPM.2010.5441376
  • Filename
    5441376