Title :
Lateral DMOS design for ESD robustness
Author :
Duvvury, C. ; Carvajal, F. ; Jones, C. ; Briggs, D.
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
Abstract :
This paper presents the design of efficient ESD protection in lateral DMOS (LDMOS) power transistor. Using characterization of the LDMOS transistor under ESD conditions with various gate and drain clamps, the design for minimum power dissipation is established. The results show that for ESD regime of pulses the channel heating effects are minimum and that optimum ESD level can be achieved by driving the device into maximum possible MOS conduction. Based on these results, an empirical formula for effective ESD design is derived.
Keywords :
design engineering; electrostatic discharge; power MOSFET; protection; semiconductor device reliability; 1 mum; 2 kV; ESD protection design; ESD robustness; HBM levels; channel heating effects; drain clamps; empirical formula; gate clamps; lateral DMOS design; lateral DMOS power transistor; maximum possible MOS conduction; minimum power dissipation; reliability threat; CMOS technology; Electrostatic discharge; Heating; Impedance; Power transistors; Protection; Pulse measurements; Robustness; Space vector pulse width modulation; Voltage;
Conference_Titel :
Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-4100-7
DOI :
10.1109/IEDM.1997.650403