Title :
Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique
Author :
Vacharanukul, Ketsaya ; Sudatham, Wiroj ; Tonmueanwai, Anusorn
Author_Institution :
Nat. Inst. of Metrol. (Thailand), Pathumthani, Thailand
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
A step gauge is a measurement standard that is used to verify a Coordinate Measuring Machine (CMM). The better the calibration system for the step gauge is, the greater the CMM verification can be. To achieve good step gauge calibration results, step gauge interferometry calibrator has been developed using a four-path laser interferometer system with the implementation of the real-time air refractive index compensation system. The system achieves the measurement uncertainty of 0.7 μm (1=2) at the length of 1 m.
Keywords :
calibration; coordinate measuring machines; light interferometers; measurement by laser beam; measurement standards; measurement uncertainty; refractive index; refractive index measurement; CMM verification; calibration system; coordinate measuring machine; four-path laser interferometer system; measurement standard; measurement uncertainty; real-time air refractive index compensation; step gauge calibration; step gauge interferometry calibrator; Calibration; Coordinate measuring machines; Equations; Mathematical model; Measurement by laser beam; Real time systems; Refractive index;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6193993
