Title :
Widely electro thermal tunable bulk-micromachined MEMS-VCSEL operating around 850nm
Author :
Davani, Hooman A. ; Grasse, Christian ; Kögel, Benjamin ; Gierl, Christian ; Zogal, Karolina ; Grundl, T. ; Westbergh, Petter ; Jatta, Sandro ; Böhm, Gerhard ; Meissner, Peter ; Larsson, Anders ; Amann, Markus-Christian
Author_Institution :
Dept. of Microwaves & Opt., Tech. Univ. Darmstadt, Darmstadt, Germany
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
We present a tunable MEMS-VCSEL operating around 850 nm wavelength with the highest reported continuous tuning range of 37 nm achieved with semiconductor DBRs. The electro thermal tuning speed of the device reaches 700 Hz.
Keywords :
distributed Bragg reflectors; laser tuning; micromachining; surface emitting lasers; distributed Bragg reflectors; electrothermal tunable bulk micromachined MEMS-VCSEL; frequency 700 Hz; semiconductor DBR; tuning range; wavelength 850 nm; Bandwidth; Distributed Bragg reflectors; Frequency measurement; Gain; Tuning; Vertical cavity surface emitting lasers;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6194011
