Zero mass loading sensitivity of the S0 Lamb wave resonance in thin film plate acoustic resonators (FPARs)

Author

Yantchev, V.

Author_Institution

Dept. Solid State Electron., Uppsala Univ., Uppsala, Sweden

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2181

Lastpage

2184

Abstract

Synchronously designed FPARs are typically operating at the upper edge of the frequency stopband due to the negative reflection coefficient of the lowest order symmetric Lamb wave (S0) in periodical strip gratings. In this study the possibility to achieve 0-sensitivity of the upper stopband edge with respect to electrode thickness tolerances is discussed for AlN based FPARs employing Al strip reflectors. 0-sensitive topologies are identified through FEM COMSOL experiments.

Keywords

acoustic resonance; acoustic resonators; aluminium compounds; finite element analysis; surface acoustic waves; 0-sensitive topologies; Al strip reflectors; AlN; AlN based FPAR; FEM COMSOL experiments; S0 Lamb wave resonance; electrode thickness tolerances; frequency stopband; lowest order symmetric Lamb wave; negative reflection coefficient; periodical strip gratings; thin film plate acoustic resonators; zero mass loading sensitivity; Acoustic reflection; Acoustic waves; Aluminum; Biomembranes; Electrodes; Frequency; Gratings; Resonance; Strips; Transistors; AlN; Lamb wave; Resonator; Stopband; Technological tolerance;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441452

Filename

5441452