Title :
Reduced order finite element models of Bulk Acoustic Wave Resonators
Author :
Katus, P. ; Reindl, L.M.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
Finite element (FE) simulation has become an important method in the modeling of Bulk Acoustic Wave (BAW) devices. Unfortunately the FE method is very demanding on computational resources. Moreover most techniques to reduce the complexity of FE models are not applicable to piezoelectric materials. Although model order reduction using moment matching can be applied to piezoelectric materials, this method is not commonly used by developers and scientists. In this work Model Order Reduction using moment matching (MOR) is utilized to simulate BAW resonators.
Keywords :
acoustic resonators; bulk acoustic wave devices; finite element analysis; piezoelectric materials; bulk acoustic wave devices; bulk acoustic wave resonators; finite element simulation; model order reduction; moment matching; piezoelectric materials; reduced order finite element model; Acoustic waves; Acoustical engineering; Computational modeling; Equations; Film bulk acoustic resonators; Finite element methods; Physics; Piezoelectric materials; Reduced order systems; Solid modeling; Bulk Acoustic Wave; FBAR; FE; FEM; Finite Element Method; MOR; Model Order; Moment Matching; Reduction;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441466
