DocumentCode
1994649
Title
Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging
Author
Kane, D.M. ; Chater, R.J. ; McPhail, D.S.
Author_Institution
Dept. of Phys. & Astron., Macquarie Univ., Sydney, NSW, Australia
fYear
2011
fDate
Aug. 28 2011-Sept. 1 2011
Firstpage
2105
Lastpage
2107
Abstract
Focussed ion beam milling, combined with secondary ion and secondary electron imaging, is used to evaluate internal imperfections in glass microspheres. Flaws on the nano-scale and micro-scale are exposed. Glass aging can also be characterised.
Keywords
ageing; electron beam applications; flaw detection; focused ion beam technology; micro-optics; milling; optical glass; optical testing; focussed ion beam imaging; focussed ion beam milling; focussed ion beam sectioning; glass aging; glass microsphere; microoptics imperfections; microscale flaws; nanoscale flaws; secondary electron imaging; secondary ion; Glass; Ion beams; Milling; Optical device fabrication; Optical imaging; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location
Sydney, NSW
Print_ISBN
978-1-4577-1939-4
Type
conf
DOI
10.1109/IQEC-CLEO.2011.6194151
Filename
6194151
Link To Document