Title :
Dynamic response of water droplet coated silicon MEMS resonators
Author :
Lin, Angel T -H ; Yan, Jize ; Seshia, Ashwin A.
Author_Institution :
Dept. of Eng., Univ. of Cambridge, Cambridge, UK
Abstract :
This paper studies the dynamic response of silicon bulk acoustic mode resonators spotted with water droplets of varying volume on the top surface. Three different cases were compared: (i) bare silicon resonators, (ii) parylene C coated resonators and (iii) hydrophobic self assembled monolayer coated resonators. Experimentally derived variations in quality factor are compared with those obtained analytically for the electrostatically driven square extensional mode resonator. The measured quality factors showed a good agreement with the models.
Keywords :
acoustic resonators; dynamic response; microcavities; micromechanical resonators; monolayers; self-assembly; bare silicon resonators; dynamic response; electrostatically driven square extensional mode resonator; hydrophobic self assembled monolayer coated resonators; parylene C coated resonators; quality factor; silicon bulk acoustic mode resonators; water droplet coated silicon MEMS resonators; Coatings; Damping; Electrodes; Electrostatics; Micromechanical devices; Optical resonators; Optical surface waves; Q factor; Resonant frequency; Silicon; bulk acoustic wave resonator; damping; hydrophobic SAM; parylene;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441588
