DocumentCode
1995549
Title
Real-time, In Situ Monitoring Of Semiconductor Processing
Author
Gottscho, Richard A. ; Aydil, Eray S. ; Giapis, Konstantinos P. ; Gregus, Jeffrey A. ; Euijoun Youn ; Hayes, Todd R. ; Vernon, Matthew F. ; Chakrabarti, U.K.
Author_Institution
AT&T Bell Laboratories
fYear
1992
fDate
16-19 Nov 1992
Firstpage
7
Lastpage
8
Keywords
Etching; Gallium arsenide; Monitoring; Passivation; Photoluminescence; Photonic band gap; Plasma applications; Plasma stability; Plasma temperature; Radiative recombination;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN
0-7803-0526-4
Type
conf
DOI
10.1109/LEOS.1992.693817
Filename
693817
Link To Document