Title :
In Situ Monitoring Of Etching And Deposition Processes For Optoelectronic Device Fabrication
Author :
Hu, Evelyn L. ; Babic, Dubrovko I. ; Skidmore, J.A. ; Strand, T. ; Schramm, J.
Author_Institution :
University of California
Keywords :
Computerized monitoring; Laser beams; Optical device fabrication; Optical feedback; Optical interferometry; Optical materials; Optical polymers; Optoelectronic devices; Reflectivity; Sputter etching;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.693818
