DocumentCode :
1995635
Title :
Ultra-thin Film Interferometry To Characterize Epitaxial Layer Interfaces And To Measure Film Thickness
Author :
Ogawa, T. ; Taijing, Lu ; Toyoda, K.
Author_Institution :
Gakushuin University
fYear :
1992
fDate :
16-19 Nov 1992
Firstpage :
13
Lastpage :
14
Keywords :
Epitaxial layers; Interference; Interferometry; Laser beams; Light scattering; Optical films; Substrates; Surface emitting lasers; Thickness measurement; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
Type :
conf
DOI :
10.1109/LEOS.1992.693820
Filename :
693820
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1995635
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