• DocumentCode
    1995635
  • Title

    Ultra-thin Film Interferometry To Characterize Epitaxial Layer Interfaces And To Measure Film Thickness

  • Author

    Ogawa, T. ; Taijing, Lu ; Toyoda, K.

  • Author_Institution
    Gakushuin University
  • fYear
    1992
  • fDate
    16-19 Nov 1992
  • Firstpage
    13
  • Lastpage
    14
  • Keywords
    Epitaxial layers; Interference; Interferometry; Laser beams; Light scattering; Optical films; Substrates; Surface emitting lasers; Thickness measurement; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
  • Print_ISBN
    0-7803-0526-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1992.693820
  • Filename
    693820
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1995635