DocumentCode
1995785
Title
In-situ Optical Diagnostics Of Semiconductor heterostructures
Author
Richter, W. ; Zahn, D.R.T.
Author_Institution
Technische Universitat Berlin
fYear
1992
fDate
16-19 Nov 1992
Firstpage
19
Lastpage
20
Keywords
Gallium arsenide; Monitoring; Optical reflection; Optical scattering; Optical sensors; Raman scattering; Rough surfaces; Spectroscopy; Surface reconstruction; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN
0-7803-0526-4
Type
conf
DOI
10.1109/LEOS.1992.693823
Filename
693823
Link To Document