Ultrasonic liear motor using traveling surface acoustic wave

Author

Kurosawa, Minoru Kuribayashi

Author_Institution

Dept. of Inf. Process., Tokyo Inst. of Technol., Yokohama, Japan

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

1096

Lastpage

1105

Abstract

A traveling wave type ultrasonic linear motor has been miniaturized successfully by using a surface acoustic wave (SAW) device. Experimental results of the SAW motor using traveling Rayleigh wave showed high performance in speed of 1.5 m/s, thrust of 13 N and mechanical power of 2 W with a 60Ã—14Ã—1 mm³ lithium niobate stator and a 4Ã—4 mm² silicon slider. Theoretical approach for SAW motor from physical modeling and behavior modeling were introduced. From the simulation, it was found that the frictional drive efficiency would reach up to 80%. An equivalent block diagram of the SAW motor was derived.

Keywords

linear motors; surface acoustic wave devices; ultrasonic motors; SAW device; SAW motor; block diagram; frictional drive efficiency; miniaturization; power 2 W; stator; traveling Rayleigh wave; traveling surface acoustic wave; ultrasonic linear motor; velocity 1.5 m/s; Acoustic transducers; Acoustic waves; Friction; Information processing; Piezoelectric transducers; Servomotors; Stators; Surface acoustic wave devices; Surface acoustic waves; Ultrasonic transducers; MEMS; SAW; actuator; friction drive; linear motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441668

Filename

5441668