Title :
Ultrasonic liear motor using traveling surface acoustic wave
Author :
Kurosawa, Minoru Kuribayashi
Author_Institution :
Dept. of Inf. Process., Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
A traveling wave type ultrasonic linear motor has been miniaturized successfully by using a surface acoustic wave (SAW) device. Experimental results of the SAW motor using traveling Rayleigh wave showed high performance in speed of 1.5 m/s, thrust of 13 N and mechanical power of 2 W with a 60×14×1 mm3 lithium niobate stator and a 4×4 mm2 silicon slider. Theoretical approach for SAW motor from physical modeling and behavior modeling were introduced. From the simulation, it was found that the frictional drive efficiency would reach up to 80%. An equivalent block diagram of the SAW motor was derived.
Keywords :
linear motors; surface acoustic wave devices; ultrasonic motors; SAW device; SAW motor; block diagram; frictional drive efficiency; miniaturization; power 2 W; stator; traveling Rayleigh wave; traveling surface acoustic wave; ultrasonic linear motor; velocity 1.5 m/s; Acoustic transducers; Acoustic waves; Friction; Information processing; Piezoelectric transducers; Servomotors; Stators; Surface acoustic wave devices; Surface acoustic waves; Ultrasonic transducers; MEMS; SAW; actuator; friction drive; linear motor;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441668
