Title :
Effects of mechanical and electrical coupling on the parametric sensitivity of mode localized sensors
Author :
Thiruvenkatanathan, P. ; Yan, J. ; Woodhouse, J. ; Aziz, A. ; Seshia, A.A.
Author_Institution :
Dept. of Eng., Univ. of Cambridge, Cambridge, UK
Abstract :
We compare and contrast the effects of two distinctly different mechanisms of coupling (mechanical and electrical) on the parametric sensitivity of micromechanical sensors utilizing mode localization for sensor applications. For the first time, the strong correlation between mode localization and the phenomenon of `eigenvalue loci-veering´ is exploited for accurate quantification of the strength of internal coupling in mode localized sensors. The effects of capacitive coupling-spring tuning on the parametric sensitivity of electrically coupled resonators utilizing this sensing paradigm is also investigated and a mass sensor with sensitivity tunable by over 400% is realized.
Keywords :
electromechanical effects; mass measurement; microsensors; piezoelectric devices; capacitive coupling-spring tuning; eigenvalue loci-veering; electrical coupling; electrically coupled resonators; internal coupling; mass sensor; mechanical coupling; micromechanical sensors; mode localization; mode localized sensors; parametric sensitivity; Capacitive sensors; Couplings; Eigenvalues and eigenfunctions; Mechanical sensors; Micromechanical devices; Oscillators; Resonance; Sensor phenomena and characterization; Springs; Vibrations; Eigenvalue curve veering; Mode localization; Sensitivity enhancement; microelectromechanical resonant sensors;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441687
