Effects of mechanical and electrical coupling on the parametric sensitivity of mode localized sensors

Author

Thiruvenkatanathan, P. ; Yan, J. ; Woodhouse, J. ; Aziz, A. ; Seshia, A.A.

Author_Institution

Dept. of Eng., Univ. of Cambridge, Cambridge, UK

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

1183

Lastpage

1186

Abstract

We compare and contrast the effects of two distinctly different mechanisms of coupling (mechanical and electrical) on the parametric sensitivity of micromechanical sensors utilizing mode localization for sensor applications. For the first time, the strong correlation between mode localization and the phenomenon of `eigenvalue loci-veering´ is exploited for accurate quantification of the strength of internal coupling in mode localized sensors. The effects of capacitive coupling-spring tuning on the parametric sensitivity of electrically coupled resonators utilizing this sensing paradigm is also investigated and a mass sensor with sensitivity tunable by over 400% is realized.

Keywords

electromechanical effects; mass measurement; microsensors; piezoelectric devices; capacitive coupling-spring tuning; eigenvalue loci-veering; electrical coupling; electrically coupled resonators; internal coupling; mass sensor; mechanical coupling; micromechanical sensors; mode localization; mode localized sensors; parametric sensitivity; Capacitive sensors; Couplings; Eigenvalues and eigenfunctions; Mechanical sensors; Micromechanical devices; Oscillators; Resonance; Sensor phenomena and characterization; Springs; Vibrations; Eigenvalue curve veering; Mode localization; Sensitivity enhancement; microelectromechanical resonant sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441687

Filename

5441687