Title :
Optical Measurement Of Internal Logic Patterns In A Flip-chip Mounted Silicon SRAM Integrated Circuit
Author :
Heinrich, H.K. ; Pakdaman, N. ; Prince, J.L. ; Jordy, G. ; Belaidi, M. ; Franch, R. ; Edelstein, D.C.
Author_Institution :
IBM T.J. Watson Research Center
Keywords :
Circuits; Electric variables measurement; High speed optical techniques; Integrated optics; Logic; Optical interferometry; Optical modulation; Optical refraction; Random access memory; Silicon;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.693872
