Title :
X-ray Investigation Of Multilayered Semiconductor Heterostructures
Author_Institution :
Centro Nazionale Ricerca e Sviluppo Material
Keywords :
Capacitive sensors; Chemicals; Epitaxial layers; Lattices; Optical superlattices; Satellites; Semiconductor materials; Structural engineering; Substrates; X-ray diffraction;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.693877