• DocumentCode
    2000286
  • Title

    Increased emission current from MIM cathodes through the use of a multilayer top electrode

  • Author

    Kusunoki, T. ; Suzuki, M.

  • Author_Institution
    Central Res. Lab., Hitachi Ltd., Tokyo, Japan
  • fYear
    1997
  • fDate
    10-10 Dec. 1997
  • Firstpage
    725
  • Lastpage
    728
  • Abstract
    Emission current density from metal-insulator-metal (MIM) cathodes has been increased by two orders of magnitude (5.8 mA/cm/sup 2/) through the use of a multilayer top electrode of Ir-Pt-Au (Ir layer at the top-electrode/insulator interface). The use of Ir, which has a high sublimation enthalpy, was effective for improving durability against diffusion of metal ions into the insulator. This property lets us apply a higher electric field (12-15 MV/cm) to the insulator than that of the MIM cathodes with a Au top-electrode we previously produced. A display demonstration of 30/spl times/30 MIM-cathode array with the proposed top-electrode showed excellent images on a phosphor screen. Moreover mechanism of hot-electron scattering in the top-electrode is also clarified.
  • Keywords
    MIM devices; cathodes; electron field emission; hot carriers; vacuum microelectronics; Ir-Pt-Au; MIM cathode array; electric field; emission current density; hot electron scattering; metal ion diffusion; metal-insulator-metal cathode; multilayer top electrode; phosphor screen image; sublimation enthalpy; Cathodes; Current density; Dielectrics and electrical insulation; Displays; Electrodes; Gold; Metal-insulator structures; Nonhomogeneous media; Phosphors; Scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International
  • Conference_Location
    Washington, DC, USA
  • ISSN
    0163-1918
  • Print_ISBN
    0-7803-4100-7
  • Type

    conf

  • DOI
    10.1109/IEDM.1997.650485
  • Filename
    650485