DocumentCode
2000286
Title
Increased emission current from MIM cathodes through the use of a multilayer top electrode
Author
Kusunoki, T. ; Suzuki, M.
Author_Institution
Central Res. Lab., Hitachi Ltd., Tokyo, Japan
fYear
1997
fDate
10-10 Dec. 1997
Firstpage
725
Lastpage
728
Abstract
Emission current density from metal-insulator-metal (MIM) cathodes has been increased by two orders of magnitude (5.8 mA/cm/sup 2/) through the use of a multilayer top electrode of Ir-Pt-Au (Ir layer at the top-electrode/insulator interface). The use of Ir, which has a high sublimation enthalpy, was effective for improving durability against diffusion of metal ions into the insulator. This property lets us apply a higher electric field (12-15 MV/cm) to the insulator than that of the MIM cathodes with a Au top-electrode we previously produced. A display demonstration of 30/spl times/30 MIM-cathode array with the proposed top-electrode showed excellent images on a phosphor screen. Moreover mechanism of hot-electron scattering in the top-electrode is also clarified.
Keywords
MIM devices; cathodes; electron field emission; hot carriers; vacuum microelectronics; Ir-Pt-Au; MIM cathode array; electric field; emission current density; hot electron scattering; metal ion diffusion; metal-insulator-metal cathode; multilayer top electrode; phosphor screen image; sublimation enthalpy; Cathodes; Current density; Dielectrics and electrical insulation; Displays; Electrodes; Gold; Metal-insulator structures; Nonhomogeneous media; Phosphors; Scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International
Conference_Location
Washington, DC, USA
ISSN
0163-1918
Print_ISBN
0-7803-4100-7
Type
conf
DOI
10.1109/IEDM.1997.650485
Filename
650485
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