• DocumentCode
    2000294
  • Title

    Scanning Excimer Ablation System

  • Author

    Goodman, Douglas S. ; Ainsworth, Thomas ; Bobroff, Northman ; Chastang, Jean-Claude ; Doany, Fuad ; Fadi, Petra ; Lovas, Steve ; Myer, Richard ; Rand, Rick ; Rosenbluth, Alan E. ; Singh, Rama ; Surovic, Chris ; Wilczynski, Janusz S.

  • Author_Institution
    IBM Thomas J. Watson Research Center
  • fYear
    1992
  • fDate
    16-19 Nov 1992
  • Firstpage
    141
  • Lastpage
    142
  • Keywords
    Apertures; Electronics packaging; Focusing; Gas lasers; Laser ablation; Lenses; Lighting; Microscopy; Mirrors; Polyimides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
  • Print_ISBN
    0-7803-0526-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1992.693883
  • Filename
    693883
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2000294