DocumentCode
2002109
Title
Particle generation of ceramic emitters for cleanroom air ionizers
Author
Okano, Kazuo ; Posadas, Arnel
Author_Institution
Polytechnic University, 4-1-1 Hashimoto-dai, Sagamihara, Kanagawa 229-11, Japan
fYear
1997
fDate
25-25 Sept. 1997
Firstpage
287
Lastpage
291
Abstract
The ceramic emitter which is composed of a needle-shaped silicon and a silicon carbide ceramic rod was developed for an LSI cleanroom air ionizer. The concentration of the particles generated from the ceramic emitter and the conventional tungsten emitter was measured in an air and an argon atmosphere. The concentration of the generated particles was the lowest for the ceramic emitter operated in the argon atmosphere. It is considered that oxide thin film formed on the emitter plays an important role in the mechanism of the particle generation due to emitter degradation.
Keywords
Argon; Ceramics; Degradation; Large scale integration; Manufacturing; Semiconductor impurities; Silicon carbide; System testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium,1997. Proceedings
Conference_Location
Orlando, FL, USA
Print_ISBN
1-878303-69-4
Type
conf
DOI
10.1109/EOSESD.1997.634254
Filename
634254
Link To Document