Title :
Theoretical sensitivity evaluation of a shear-horizontal SAW based micro rate sensor
Author :
Wang, Wen ; He, Shitang ; Li, Honglang
Author_Institution :
Inst. of Acoust., Chinese Acad. of Sci., Beijing, China
Abstract :
This paper presents a theoretical analysis on response mechanism of a micro rate sensor based on shear horizontal surface acoustic wave (SH-SAW) gyroscopic effect. The new SH-SAW propagating along the ST-90°X quartz substrate by composing heavy metal interdigital tranducers (IDTs) provides superior temperature stability, large acoustic velocity and higher electromechanical coupling factors. Using partial-wave analysis methods, the behavior of shear horizontal SAW propagating along pre-rotated ST-90°X quartz substrate was investigated. The angular detection sensitivity in the propagation path of SH-SAW was evaluated and the effect of the metal IDT electrode thickness on the sensor performance was also studied, optimal IDT electrode thickness was determined.
Keywords :
gyroscopes; interdigital transducers; quartz; surface acoustic wave sensors; SH SAW gyroscopic effect; acoustic velocity; angular detection sensitivity; electrode thickness; electromechanical coupling factors; heavy metal interdigital tranducers; partial wave analysis; quartz substrate; response mechanism analysis; sensitivity evaluation; shear horizontal SAW based microrate sensor; surface acoustic wave; temperature stability; Acoustic propagation; Acoustic sensors; Electrodes; Electromechanical sensors; Frequency; Gyroscopes; Optical surface waves; Stability; Surface acoustic waves; Temperature sensors; SH-SAW; ST-90°X substrate; gyroscopic effect; micro rate sensor; partial-wave analysis; sensitivity;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441914
