A new type of MEMS ultrasonic separator based on 2-D normal mode

Author

Wang, Yuxiang ; Ding, Jiexiong ; Hua, Chenhui

Author_Institution

Sch. of Mechatron. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2529

Lastpage

2532

Abstract

Separation of suspended particles with ultrasonic radiation force suggests advantages in MEMS. But there are some difficulties to position the outlets in MEMS ultrasonic separator based on one-dimensional (1-D) resonance. In this paper, a new type of MEMS ultrasonic resonance separator, where two anti-phase PZT-transducers are employed to generalize two-dimensional (2-D) normal mode, is exhibited and analyzed. This new separator is designed to form clean and turbid streams along lateral direction. Then the outlets would be easily located along the flow. A mathematics model of sound field in fluid layer is applied to analyze this new 2-D resonance separator. The structure of this new separator is also exhibited, and the ultrasonic radiation force potential of (1, 1) normal mode in the fluid layer are calculated. Then the limitation for the properties of the particles and the fluid in this separator is deduced according to the solution. At last, the experiment result is exhibited and the advantages of this new separator are proved.

Keywords

flow separation; micromechanical devices; multiphase flow; piezoelectric transducers; suspensions; ultrasonic applications; ultrasonic transducers; 1D resonance; 2D normal mode; MEMS ultrasonic resonance separator; antiphase PZT transducers; fluid layer; sound field; suspended particles separation; ultrasonic radiation force; Biology; Filtration; Mathematical model; Mathematics; Medical services; Micromechanical devices; Particle separators; Resonance; Solids; Two dimensional displays; MEMS; normal mode; particles; separation; ultrasonic radiation force;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441950

Filename

5441950