• DocumentCode
    2004463
  • Title

    Assembly and preliminary testing of the prototype 650 GHz BWO

  • Author

    Dayton, James A., Jr. ; Mearini, Gerald T. ; Kory, Carol L. ; Malta, Dean ; Lueck, Matthew ; Tabeling, Joseph W. ; Worthington, Scott ; Holland, Christopher ; Spindt, Charles

  • Author_Institution
    Teraphysics, Corp., Cleveland, OH
  • fYear
    2008
  • fDate
    22-24 April 2008
  • Firstpage
    394
  • Lastpage
    395
  • Abstract
    Approximately twenty intricate diamond structures have been fabricated, selectively metallized and assembled into prototype 650 GHz backward wave oscillators (BWOs). The chemical vapor deposition (CVD) diamond structure is grown into a silicon mold fabricated using deep reactive ion etching. The lithographic fabrication processes employed produce dozens of devices from each lot. The RF power generated is radiated directly from the BWO for compatibility with a quasi-optical sub-mm system. The interdigital slow wave circuit, the electron gun, the output coupler and the antenna are fabricated as a single piece of diamond to eliminate difficulties with alignment. We will describe the processes of fabrication and assembly, and present available preliminary results of prototype testing.
  • Keywords
    CVD coatings; backward wave oscillators; diamond; slow wave structures; sputter etching; BWO; antenna; backward wave oscillators; chemical vapor deposition diamond structure; deep reactive ion etching; electron gun; frequency 650 GHz; interdigital slow wave circuit; intricate diamond structures; lithographic fabrication process; output coupler; prototype testing; Assembly; Chemical vapor deposition; Etching; Fabrication; Metallization; Oscillators; Prototypes; Radio frequency; Silicon; Testing; BWO; CVD diamond; DRIE; THz; micro fabrication; sub-mm wavelength;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference, 2008. IVEC 2008. IEEE International
  • Conference_Location
    Monterey, CA
  • Print_ISBN
    978-1-4244-1715-5
  • Type

    conf

  • DOI
    10.1109/IVELEC.2008.4556365
  • Filename
    4556365