DocumentCode
2005025
Title
Dynamic properties of individual carbon nanotube emitters for maskless lithography
Author
Ribaya, Bryan P. ; Niemann, Darrell L. ; Makarewicz, Joseph ; Gunther, Norman G. ; Nguyen, Cattien V. ; Rahman, Mahmud
Author_Institution
Electron Devices Lab., Santa Clara Univ., Santa Clara, CA
fYear
2008
fDate
22-24 April 2008
Firstpage
439
Lastpage
440
Abstract
In this paper, we present an empirical study of dynamic behavior of an electron source system which incorporates an individual CNT. We propose a representative circuit model that is simple yet particularly valuable for emission current control for each CNT emitter in an array to facilitate high throughput maskless lithography.
Keywords
carbon nanotubes; electron sources; lithography; carbon nanotube emitters; dynamic properties; electron source; maskless lithography; representative circuit; Carbon nanotubes; Cathodes; Circuits; Diodes; Electron beams; Electron sources; Lithography; Resistors; Scanning electron microscopy; Voltage; carbon nanotube; dynamic properties; emitter array; field emission; maskless lithography; voltage-controlled variable resistor;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference, 2008. IVEC 2008. IEEE International
Conference_Location
Monterey, CA
Print_ISBN
978-1-4244-1715-5
Type
conf
DOI
10.1109/IVELEC.2008.4556392
Filename
4556392
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