Title :
Comparison of different piezoelectric materials for GHz acoustic microscopy transducers
Author :
Jakob, Anette ; Bender, Marc ; Knoll, T. ; Lemor, Robert ; Zhou, Qu ; Zhu, B.P. ; Han, J.X. ; Shung, K. Kirk ; Lehnert, T. ; Koch, Martin ; Veith, M.
Author_Institution :
Fraunhofer IBMT, St. Ingbert, Germany
Abstract :
Today acoustic microscopy transducers are based on zinc oxide, ZnO, films as piezoelectric material. Especially in the GHz range the insertion loss of existing ZnO transducers has to be improved for better imaging. The motivation for this work was to substitute the ZnO by the piezoelectric material lead zirconate titanate, PZT, with better electro mechanical properties. Novel technologies of sol-gel and metal organic chemical vapor deposition method (MOCVD) were used to realize high frequency PZT thin film transducers with 200 ¿m aperture diameter. The transducers were characterized by electrical and acoustical measurement. Their performance for acoustic microscopy was evaluated.
Keywords :
MOCVD; acoustic microscopy; lead compounds; piezoceramics; piezoelectric thin films; piezoelectric transducers; sol-gel processing; ultrasonic transducers; zinc compounds; GHz acoustic microscopy transducers; MOCVD; PZT; ZnO; aperture diameter; electromechanical properties; high frequency PZT thin film transducers; insertion loss; lead zirconate titanate; metal organic chemical vapor deposition method; piezoelectric material; sol-gel processiing; Acoustic imaging; Acoustic transducers; Insertion loss; Mechanical factors; Microscopy; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Titanium compounds; Zinc oxide; Acoustic microscopy; MOCVD PZT; PZT film; ZnO; sol-gel PZT;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5442024
