• DocumentCode
    2005321
  • Title

    Temperature compensated solidly mounted resonators with thin SiO2 layers

  • Author

    Allah, Mohamed Abd ; Kaitila, Jyrki ; Thalhammer, Robert ; Weber, Werner ; Schmitt-Landsiedel, Doris

  • Author_Institution
    Lehrstuhl fur Tech. Elektron., Tech. Univ. Munchen, Munich, Germany
  • fYear
    2009
  • fDate
    20-23 Sept. 2009
  • Firstpage
    859
  • Lastpage
    862
  • Abstract
    Temperature compensation is becoming more and more a high demand for RF filters in order to successfully meet the tightening specifications over a wide range of temperatures. We show our results on temperature compensation by adding thin SiO2 layers at high stress regions inside the resonator. We examine the effect of adding the SiO2 layer on the resonators properties and we extract an accurate value to the temperature coefficient of stiffness of thin film SiO2.
  • Keywords
    acoustic resonator filters; bulk acoustic wave devices; compensation; elasticity; silicon compounds; RF filters; SiO2; high stress region; temperature coefficient; temperature compensated solidly mounted resonators; thin SiO2 layers; thin film SiO2 stiffness; Acoustic devices; Acoustic waves; Bandwidth; Mirrors; Resonance; Resonant frequency; Resonator filters; Stress; Temperature dependence; Temperature distribution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2009 IEEE International
  • Conference_Location
    Rome
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4244-4389-5
  • Electronic_ISBN
    1948-5719
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2009.5442034
  • Filename
    5442034
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2005321