Ab-initio mesh-less modelling of three dimensional massloading effects in SAW and BAW devices

Author

Vagh, Hardik ; Baghai-Wadji, Alireza ; Chamaly, Stephane

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, VIC, Australia

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2684

Lastpage

2687

Abstract

Brute force three dimensional simulation of Surface Acoustic Wave (SAW) and Bulk Acoustic Wave (BAW) devices with massive metallic electrodes of finite-aperture, massive busbars and massive protective closure structures is a prohibitively difficult task. This paper presents conceptually new ideas and implementation tools based on a mesh-less analysis of the problem, to tackle the daunting task of modelling 3D massloading effect with high accuracy. A sophisticated combination of spectral theory, weak Galerkin method and Green´s function theory has been employed. A proof of concept has been provided.

Keywords

Galerkin method; Green´s function methods; bulk acoustic wave devices; electrodes; piezoelectric devices; surface acoustic wave devices; 3D massloading effect modelling; 3D massloading effects; BAW devices; Green´s function theory; SAW devices; ab initio meshless modelling; bulk acoustic wave devices; finite aperture metallic electrodes; massive busbars; massive metallic electrodes; massive protective closure structures; spectral theory; surface acoustic wave devices; weak Galerkin method; Acoustic waves; Bulk acoustic wave devices; Electrodes; Geometry; Green´s function methods; Libraries; Moment methods; Stress; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5442041

Filename

5442041