DocumentCode
2005770
Title
A Novel Trench Capacitor Structure for ULSI DRAMs
Author
Rajeevakumar, T.V. ; Bronner, G.B.
Author_Institution
IBM Research Division, NY
fYear
1991
fDate
28-30 May 1991
Firstpage
7
Lastpage
8
Keywords
Amorphous silicon; Capacitance; Capacitors; Counting circuits; Dielectric substrates; Electrodes; Etching; Random access memory; Stability; Ultra large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location
Oiso, Japan
Type
conf
DOI
10.1109/VLSIT.1991.705963
Filename
705963
Link To Document