Traveling wave annular ultrasonic micromotors using bulk PZT

Author

Hareesh, Prakruthi ; Yang, Shuang ; DeVoe, Don L.

Author_Institution

Dept. of Mech. Eng., Univ. of Maryland, College Park, MD, USA

fYear

2012

fDate

27-27 March 2012

Firstpage

1

Lastpage

3

Abstract

This paper describes the development a novel traveling wave ultrasonic micromotor fabricated directly from low-cost and high-performance bulk piezoceramic PZT. We report a simpler approach to realizing traveling wave ultrasonic micromotors in which traveling waves are generated within a tethered annular stator microfabricated from a single sheet of bulk PZT. Actuation is achieved using interdigitated electrodes deposited on a single layer, enabling monolithic stators to be fabricated in a batch process from a single sheet of high quality bulk piezoceramic. The process requires only 2 photolithography steps, greatly simplifying design and manufacture while improving device performance and microfabrication costs.

Keywords

batch processing (industrial); electrostatic motors; microfabrication; micromotors; piezoceramics; stators; ultrasonic motors; batch process; bulk PZT; bulk piezoceramic; interdigitated electrodes; microfabrication; monolithic stators; piezoceramic; tethered annular stator; traveling wave annular ultrasonic micromotor; Acoustics; Electrodes; Fabrication; Films; Micromotors; Resists; Stators; Micromotors; piezoelectric transducers; stators; ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Microsystems for Measurement and Instrumentation (MAMNA), 2012

Conference_Location

Annapolis, MD

Print_ISBN

978-1-4673-1781-8

Type

conf

DOI

10.1109/MAMNA.2012.6195092

Filename

6195092