Title :
Direction writing of graphene-based nanoribbons via thermochemical nanolithography
Author :
Haydell, M. ; Cimpoiasu, E. ; Lee, W-K ; Sheehan, P.E. ; Stine, R.R. ; King, W.P.
Author_Institution :
Phys. Dept., United States Naval Acad., Annapolis, MD, USA
Abstract :
This project employs direct writing with an atomic force microscope (AFM) to fabricate simple graphene-based electronic components like resistors and transistors at nanometer-length scales. The goal is to explore their electronic properties for graphene-based electronics. Conducting nanoribbons of graphene were fabricated using thermochemical nanolithography (TCNL). TCNL uses a heated AFM cantilever to provide precise local heating to an insulating fluorographene (FG) substrate. The heat reduces the substrate into a material known as reduced fluorographene (rFG) which exhibits electric properties close to those of pristine graphene. Compared to other attempts to produce graphene-based devices, this technique is simple, does not involve solvents or other complicated fabrication steps, and allows for the exact placement of the devices on the wafer.
Keywords :
MOSFET; atomic force microscopy; cantilevers; graphene; nanoelectronics; nanofabrication; nanolithography; nanoribbons; thermochemistry; C; MOSFET circuits; TCNL; atomic force microscope; conducting nanoribbons; direction writing; electric properties; graphene-based electronic components; graphene-based nanoribbons; heated AFM cantilever; insulating fluorographene substrate; local heating; nanometer-length scales; pristine graphene; resistors; thermochemical nanolithography; transistors; Fabrication; Heating; Logic gates; Nanolithography; Probes; Silicon; Graphene; MOSFET circuits; Nanoelectronics; Thermochemical Nanolithography; Transistors;
Conference_Titel :
Microsystems for Measurement and Instrumentation (MAMNA), 2012
Conference_Location :
Annapolis, MD
Print_ISBN :
978-1-4673-1781-8
DOI :
10.1109/MAMNA.2012.6195093