Title :
A MEMS sensor for low-frequency vibration energy harvesting
Author :
Moses, Matthew S. ; Wester, Brock A. ; Brown, Chris Y. ; Kutzer, Michael D. ; Kucher, Paul R. ; Rebello, Keith J.
Author_Institution :
Appl. Phys. Lab., Johns Hopkins Univ., Laurel, MD, USA
Abstract :
This paper reports ongoing work in development of a MEMS electrostatic sensor for self-powered detection of mechanical vibrations of less than 1000 Hz. The sensor is an in-plane overlapping comb configuration. Six different variants on a common design were fabricated on a single die using the commercial SOI-MUMPS process. Additional masses were manually added to lower the resonant frequency.
Keywords :
electrostatic devices; energy harvesting; microsensors; silicon-on-insulator; vibration measurement; MEMS electrostatic sensor; commercial SOI-MUMPS process; in-plane overlapping comb configuration; low-frequency vibration energy harvesting; mechanical vibration; microelectromechanical system; resonant frequency; self-powered detection; sensor design fabrication; single die; Capacitance; Electrostatics; Energy harvesting; Fingers; Micromechanical devices; Resonant frequency; Vibrations; electrostatic devices; energy harvesting; vibration measurement;
Conference_Titel :
Microsystems for Measurement and Instrumentation (MAMNA), 2012
Conference_Location :
Annapolis, MD
Print_ISBN :
978-1-4673-1781-8
DOI :
10.1109/MAMNA.2012.6195098
