A novel integrated system of sensor and actuator for droplets on sensor plate/matching layer/piezoelectric substrate structure

With the continuing development of biotechnology and nanotechnology, a miniaturized and integrated device that is capable of controlling and measuring a small droplet has become desirable. Using a surface acoustic wave (SAW), a droplet is manipulated. If the sensor is fabricated onto the SAW propagating surface, a novel sensor and actuator integrated system, namely digital microfluidic system, is realized. The integrated device is called a ¿micro-laboratory.¿ In this paper, to actualize a disposable micro-laboratory, three-layer structure of sensor plate/ matching layer/ piezoelectric substrate is examined. Droplet manipulation, mixing and measurement are succeeded using the proposed novel micro-laboratory.