DocumentCode :
2006676
Title :
Dielectric layers with gradual properties
Author :
Makasheva, Kremena ; Despax, Bernard ; Boudou, Laurent ; Teyssedre, Gilbert ; Ressier, Laurence ; Pons, Patrick
Author_Institution :
LAPLACE (Lab. Plasma et Conversion d´´Energie), Univ. de Toulouse, Toulouse, France
fYear :
2010
fDate :
4-9 July 2010
Firstpage :
1
Lastpage :
4
Abstract :
This work presents results from a study of thin dielectric layers organized in a structure that behaves as an unified layer with gradual properties. A better understanding of dielectric charging phenomena is aimed at in order to control the conductive properties of the multi-layer system. We first characterize each mono-layer deposited singly on a substrate before the characterization of our multi-layer system. The presented results are for the material and electrical properties of the layers. They are obtained from different diagnostic methods. It was found that such a concept allows modulation of the conductive properties of dielectric materials.
Keywords :
dielectric materials; dielectric properties; dielectric thin films; electrical conductivity; conductive properties; dielectric charging; dielectric materials; dielectric properties; dielectric thin layers; electrical properties; monolayer deposition; Conductivity; Dielectrics; Ellipsometry; Films; Gold; Silicon; Substrates; RF MEMS capacitive switches; diagnostics; dielectric charging; insulating materials;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid Dielectrics (ICSD), 2010 10th IEEE International Conference on
Conference_Location :
Potsdam
Print_ISBN :
978-1-4244-7945-0
Electronic_ISBN :
978-1-4244-7943-6
Type :
conf
DOI :
10.1109/ICSD.2010.5568260
Filename :
5568260
Link To Document :
بازگشت