Title :
Fiber-optic confocal microscope with an electrothermally-actuated, large-tunable-range microlens scanner for depth scanning
Author :
Liu, Lin ; Wu, Lei ; Zory, Peter ; Xie, Huikai
Author_Institution :
Univ. of Florida, Gainesville, FL, USA
Abstract :
We present a fiber-optic reflectance confocal microscope using a large-tunable-range MEMS microlens scanner for automatic axial scan. The tunable microlens is actuated by an electrothermal actuator that is capable of scanning up to 0.9 mm at less than 6.3 V. The lateral shift and tilt of the microlens are about 10 ¿m and 0.4°, respectively. 2-D cross-sectional reflectance confocal images of micro-particles in polymer and rat skin have been obtained with the lateral and axial resolutions of about 1.2 ¿m and 38 ¿m, respectively.
Keywords :
actuators; fibre optic sensors; microlenses; micromechanical devices; optical microscopes; optical scanners; polymers; MEMS microlens scanner; automatic axial scan; depth scanning; electrothermal actuator; fiber optic reflectance confocal microscope; lateral shift; microparticles; polymer; rat skin; tunable microlens; Actuators; Electrothermal effects; Image resolution; Lenses; Micromechanical devices; Microoptics; Microscopy; Polymers; Reflectivity; Skin;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442280
