Title :
Rotational optical alignment for array based free space board-to-board optical interconnect with zero power hold
Author :
Chou, Jeffrey ; Yu, Kyoungsik ; Bakhishev, Teymur ; Horsley, David ; Walmsley, Robert ; Mathai, Sagi ; Tan, Mike ; Wang, S.Y. ; Subramanian, Vivek ; Wu, Ming
Author_Institution :
Univ. of California, Berkeley, CA, USA
Abstract :
We present an electrothermally actuated, rotating microlens array for the application of aligning free-space optical interconnects. A bistable mechanical brake holds the rotating stage after alignment so it does not consume any power in steady state. A 4 × 4 double-sided microlens array is fabricated via micro-inkjet printing and is precisely mounted on the lens shuttle with alignment bumps. Our MEMS device has a maximum rotation angle of 2.3° at an average velocity of 5.75°/s, and is capable of correcting angular misalignment of the laser/photodetector array chips. Measured CCD images of a 1 × 4 VCSEL array are presented to demonstrate the function of the device.
Keywords :
ink jet printing; microlenses; micromechanical devices; optical interconnections; MEMS device; array based free space; board-to-board optical interconnect; free-space optical interconnects; micro-inkjet printing; rotating microlens array; rotational optical alignment; zero power hold; Electrothermal effects; Lenses; Microelectromechanical devices; Microoptics; Optical arrays; Optical bistability; Optical interconnections; Photodetectors; Printing; Steady-state;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442283
