Title :
Micromachined passive magnetostatic relays for portable applications
Author :
Tang, Min ; Liao, Ebin ; Kuo, Cheng Cheng JK ; Lee, Dayong ; Kumar, Rakesh ; Lee, Yong Hean ; Shankar, Ravi ; Le Neel, Olivier ; Noviello, Giuseppe ; Italia, Francesco
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
A passive MEMS magnetostatic relay using only one electroplated magnetic layer was presented. The relay consists of an electroplated Ni80Fe20 plate supported by a pair of torsion bars from two sides. The relay is actuated by approaching an external magnet to the relay. The switching-on magnetic field is about 4.8 mT and the contact resistance is about 3 ohms with gold contact. The lifetime testing shows more than 7.5 million hot switching cycles with 1-2 mA current. This passive magnetic relay could find applications in portable electronics, such as cellular phones, personal data assistant (PDA), pace makers, hearing aids, etc.
Keywords :
contact resistance; life testing; magnetostatics; micromachining; microrelays; cellular phones; contact resistance; current 1 mA to 2 mA; electroplated magnetic layer; gold contact; hearing aids; hot switching cycles; lifetime testing; magnetic field; micromachined passive magnetostatic relays; pace makers; passive MEMS magnetostatic relay; personal data assistant; portable electronics; pressure 4.8 mtorr; resistance 3 ohm; torsion bars; Bars; Contact resistance; Gold; Iron; Life testing; Magnetic fields; Magnetic switching; Magnetostatics; Micromechanical devices; Relays;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442292
