Thermogravimetric device with integrated thermal actuators

Author

Iervolino, E. ; van Herwaarden, A.W. ; van der Vlist, W. ; Sarro, P.M.

Author_Institution

Xensor Integration, Delfgauw, Netherlands

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

683

Lastpage

686

Abstract

This paper presents the first MEMS device for ThermoGravimetric Analysis (TGA) with integrated thermal actuators. It consists of a sensing cantilever paddle connected to two separated thermal actuators, one at each side of the cantilever. Moreover, it has an integrated thermocouple that allows combined TGA and calorimetric measurements. To demonstrate the device performance TGA of copper sulfate pentahydrate (CuSO₄Â·5H₂O) samples has been performed. The operation range for the TGA device is 40 pg up to 0.1 Â¿g for the mass and 25 up to 650Â°C for the temperature. The mass sensitivity is about 200 Hz for a 1 ng sample on the 10 kHz resonance frequency.

Keywords

actuators; calorimetry; cantilevers; micromechanical devices; thermal analysis; thermocouples; MEMS device; TGA; calorimetric measurements; copper sulfate pentahydrate; frequency 10 kHz; integrated thermal actuators; sensing cantilever paddle; temperature 650 degC; thermocouple; thermogravimetric analysis; Bridge circuits; Capacitive sensors; Piezoelectric actuators; Piezoresistance; Resonance; Resonant frequency; Silicon compounds; Temperature distribution; Temperature sensors; Thermal resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442316

Filename

5442316