Monolithic vertical integration of metal-oxide-semiconductor transistor with subterranean photonics in silicon

Author

Indukuri, Tejaswi ; Koonath, Prakash ; Jalali, Bahram

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA

fYear

2006

fDate

5-10 March 2006

Abstract

Monolithic integration of photonics and electronics has been achieved in silicon by vertically integrating metal-oxide-semiconductor field-effect transistors and waveguide-coupled microdisk resonators in a double-layer silicon-on-insulator wafer, thus paving the way towards dense three-dimensional optoelectronic integration

Keywords

MIS devices; elemental semiconductors; field effect transistors; integrated optics; integrated optoelectronics; microcavities; monolithic integrated circuits; optical resonators; optical waveguides; silicon; silicon-on-insulator; Si-SiO₂; dense optoelectronic integration; field-effect transistors; metal-oxide-semiconductor transistor; microdisk resonators; monolithic vertical integration; silicon-on-insulator wafer; subterranean photonics; three-dimensional optoelectronic integration; waveguide-coupled resonators; FETs; Integrated optics; MOSFETs; Optical devices; Optical filters; Optical resonators; Optical surface waves; Optical waveguides; Photonics; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communication Conference, 2006 and the 2006 National Fiber Optic Engineers Conference. OFC 2006

Conference_Location

Anaheim, CA

Print_ISBN

1-55752-803-9

Type

conf

DOI

10.1109/OFC.2006.215480

Filename

1636511