New micro thermoelectric devices based on bismuth telluride-type thin solid films

The sputtering technology for deposition of thermoelectric effective bismuth telluride-type material thin films on foils including pattern generation by photolithography was developed by D.T.S. The properties as electrical conductivity, thermoelectric power and the power factor of such p- and n-type films are presented and the advantages of the thin film technology are explained in relation to the bulk material manufacturing. Based on thin films the cost saving production of new micro thermoelectric devices as Low Power Thermoelectric Generators (LPTG) and infrared sensors (IRS) is possible. The LPTG are energy sources with a power output of a few 10 /spl mu/W for self-sufficient micro and sensor systems and the IRS are fast infrared detectors working after the thermopile principle. The technical parameters of the LPTG as output voltage and power in dependence on the temperature difference, internal resistance, integration density and of IRS, e.g. detectivity and time constant are given in detail. Especially with the LPTG the possibility for the construction of new autonomous sensor and micro systems is now opened. Numerous examples for the applications of the devices are indicated. Improvements for the technology and the output parameters of the devices are suggested.