A position and force-distribution sensor-array for monitoring the contact condition of objects in micro-handling

This paper presents a piezoresistive sensor-array for micro-handling applications, capable of detecting the contact locations of an object and the distribution of the contact forces across the array elements. The device is fabricated with an IC-compatible process. Cantilevers with different shapes are used as test objects to push against the device at various positions and orientations. By combining the outputs from the array, the difference between the positions, orientations and shapes of the cantilevers are distinguished. The resolution for detecting the contact locations on each array element is 10 ¿m, when a force of 1 mN is applied. The maximum contact force on each array element is 3 mN with a resolution of 1 ¿N.