Title :
Wafer scale coating of polymer cantilever fabricated by nanoimprint lithography
Author :
Greve, Anders ; Dohn, Søren ; Keller, Stephan ; Vig, Asger L. ; Kristensen, Anders ; Nielsen, Claus H. ; Larsen, Niels B. ; Boisen, Anja
Author_Institution :
Tech. Univ. of Denmark, Lyngby, Denmark
Abstract :
Microcantilevers can be fabricated in TOPAS by nanoimprint lithography, with the dimensions of 500 ¿m length 4.5 ¿m thickness and 100 ¿m width. By using a plasma polymerization technique it is possible to selectively functionalize individually cantilevers with a polymer coating, on wafer scale by using a shadow masking technique.
Keywords :
cantilevers; microfabrication; microsensors; nanolithography; polymer films; polymerisation; soft lithography; wafer-scale integration; TOPAS; microcantilevers; nanoimprint lithography fabrication; plasma polymerization technique; polymer cantilever; polymer coating; shadow masking technique; wafer scale coating; Coatings; Etching; Fabrication; Gold; Nanolithography; Passivation; Plasma applications; Polymer films; Silicon; Stress;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442334
