Influence of the doping material on the benzene detection

Author

Ivanov, P. ; Blanco, F. ; Gràcia, I. ; Sabaté, N. ; Vilanova, X. ; Correig, X. ; Fonseca, L. ; Figueras, E. ; Santander, J. ; Rubio, R. ; Cané, C.

Author_Institution

Centro Nacional de Microelectron., CNM-CSIC, Bellaterra

fYear

2006

fDate

Oct. 2006

Firstpage

185

Lastpage

188

Abstract

In this paper we describe the fabrication of low-cost micro-hotplate benzene sensors by using screen-printing technology. Sensitive layers of tin and tungsten oxide (pure and doped with 1% in weight of Au, Pt and Pd) were deposited on silicon micromachined substrates with low thermal inertia. Gas measurements were performed with the fabricated sensors and the results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors

Keywords

doping; gas sensors; gold; microsensors; organic compounds; palladium; platinum; thick film sensors; battery powered gas/vapour monitors; benzene detection; doping material; gas measurements; micro hotplate; screen printing technology; silicon micromachined substrates; tin oxide; tungsten oxide; Biomembranes; Bonding; Doping; Electrodes; Gas detectors; Optical polymers; Packaging; Polymer films; Sensor arrays; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Devices and Microsystems, 2006. ASDAM '06. International Conference on

Conference_Location

Smolenice Castle

Print_ISBN

1-4244-0369-0

Type

conf

DOI

10.1109/ASDAM.2006.331185

Filename

4133109