Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications

Author

Hino, Ryunosuke ; Esashi, Masayoshi ; Tanaka, Shuji

Author_Institution

Dept. of Nanomech., Tohoku Univ., Sendai, Japan

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

871

Lastpage

874

Abstract

A Lamb wave sensor to measure the concentration of methanol solution in direct methanol fuel cell (DMFC) systems was designed, fabricated and evaluated. The sensor piezoelectrically generates the lowest antisymmetric mode (A0-mode) Lamb wave on a suspended thin AlN/SiO₂/Si composite membrane, and confines a standing wave with edge reflectors. The fabricated sensor showed an almost constant sensitivity of 510 ppm/% in methanol concentration from 0 % to 100 %. The temperature coefficient of frequency (TCF) was found to be -31 ppm/K, which might approach zero by using a 1 Â¿m thick buried oxide (BOX) layer.

Keywords

direct methanol fuel cells; optical elements; surface acoustic wave sensors; AlN-SiO₂-Si; BOX layer; DMFC; TCF; antisymmetric-mode lamb wave methanol sensor; buried oxide layer; composite membrane; direct methanol fuel cell; edge reflectors; methanol solution concentration measurement; piezoelectric sensors; sensitivity; temperature coefficient of frequency; Acoustic devices; Acoustic sensors; Acoustic waves; Biomembranes; Fluid flow control; Frequency; Fuel cells; Methanol; Oscillators; Sensor systems and applications;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442345

Filename

5442345