• DocumentCode
    2008964
  • Title

    Monolithic micro gas chromatographic separation column and detector

  • Author

    Kaanta, Bradley ; Chen, Hua ; Zhang, Xin

  • Author_Institution
    Boston Univ., Boston, MA, USA
  • fYear
    2010
  • fDate
    24-28 Jan. 2010
  • Firstpage
    907
  • Lastpage
    910
  • Abstract
    We present the design, fabrication, and operation of the first monolithic gas chromatography (GC) separation column and detector. The monolithic integration of a high sensitivity detector with a separation column has many potential advantages over the discrete components of a traditional chromatography system. In high-speed GC systems, component interconnections can cause crucial errors which increase with the square of analysis speed causing critical loss of resolution. A monolithically integrated device would eliminate the requirement for helium-tight interconnections, which are bulky and labor intensive. Additionally, batch fabrication of integrated devices would eliminate the requirement for a separate, expensive, and fragile detector, which decreases the cost of micro GC systems through economies of scale.
  • Keywords
    chromatography; gas sensors; monolithic integrated circuits; helium-tight interconnections; high sensitivity detector; high-speed GC systems; monolithic microgas chromatographic separation column; monolithically integrated device; Assembly systems; Chemical analysis; Chemical industry; Costs; Delay; Detectors; Economies of scale; Fabrication; Gas chromatography; Monolithic integrated circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
  • Conference_Location
    Wanchai, Hong Kong
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-5761-8
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2010.5442354
  • Filename
    5442354