DocumentCode
2008964
Title
Monolithic micro gas chromatographic separation column and detector
Author
Kaanta, Bradley ; Chen, Hua ; Zhang, Xin
Author_Institution
Boston Univ., Boston, MA, USA
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
907
Lastpage
910
Abstract
We present the design, fabrication, and operation of the first monolithic gas chromatography (GC) separation column and detector. The monolithic integration of a high sensitivity detector with a separation column has many potential advantages over the discrete components of a traditional chromatography system. In high-speed GC systems, component interconnections can cause crucial errors which increase with the square of analysis speed causing critical loss of resolution. A monolithically integrated device would eliminate the requirement for helium-tight interconnections, which are bulky and labor intensive. Additionally, batch fabrication of integrated devices would eliminate the requirement for a separate, expensive, and fragile detector, which decreases the cost of micro GC systems through economies of scale.
Keywords
chromatography; gas sensors; monolithic integrated circuits; helium-tight interconnections; high sensitivity detector; high-speed GC systems; monolithic microgas chromatographic separation column; monolithically integrated device; Assembly systems; Chemical analysis; Chemical industry; Costs; Delay; Detectors; Economies of scale; Fabrication; Gas chromatography; Monolithic integrated circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442354
Filename
5442354
Link To Document