FEM Simulation and Characterization of Microcantilevers Resonators

Author

Narducci, Margarita S. ; Figueras, Eduard ; García, Isabel ; Fonseca, Luís ; Cané, Carles

Author_Institution

Centro Nacional de Microelectron. de Barcelona

fYear

2006

fDate

Oct. 2006

Firstpage

267

Lastpage

270

Abstract

This work has been focused on the design, simulation, fabrication and characterisation of cantilevers structures that include the excitation element and a bending sensor. Structures have been fabricated with different dimensions and geometries, its operation verified and their resonance frequency and quality factor (Q) measured. Device performance was compared with simulation predictions obtained using finite element analysis (FEA) with ANSYS. For example, structures with dimensions in the range of 200times150mum² to 400times300mum² shown the first mode of resonance frequency laid between 440 KHz and 90 KHz and the quality factor between 770 and 1100

Keywords

Q-factor; cantilevers; finite element analysis; micromechanical resonators; bending sensor; finite element analysis; microcantilevers resonators; quality factor; resonance frequency; Analytical models; Fabrication; Frequency measurement; Geometry; Predictive models; Q factor; Q measurement; Resonance; Resonant frequency; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Devices and Microsystems, 2006. ASDAM '06. International Conference on

Conference_Location

Smolenice Castle

Print_ISBN

1-4244-0369-0

Type

conf

DOI

10.1109/ASDAM.2006.331205

Filename

4133129