DocumentCode :
2009554
Title :
3D technology roadmap and status
Author :
Marchal, Paul ; Van der Plas, Geert ; Eneman, Geert ; Moroz, Victor ; Badaroglu, Mustafa ; Mercha, Abdelkarim ; Thijs, Steven ; Linten, Dimitri ; Guruprasad, Katti ; Stucchi, Michele ; Vandevelde, Bart ; Prins, Herman O. ; Cherman, Vladimir ; Croes, Krist
Author_Institution :
IMEC, Leuven, Belgium
fYear :
2011
fDate :
8-12 May 2011
Firstpage :
1
Lastpage :
3
Abstract :
The semiconductor industry is witnessing a major shift towards heterogeneous 3D integration. Whether companies are active in high performance or consumer markets systems, 3D offers a myriad of opportunities. We will review the different opportunities, indicate process availability and remaining challenges from both design and technology perspective.
Keywords :
semiconductor industry; three-dimensional integrated circuits; 3D technology roadmap; consumer market system; heterogeneous 3D integration; semiconductor industry; Mobile communication; Random access memory; Silicon; Stacking; Stress; Three dimensional displays; Through-silicon vias; 3D; Characterization;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International
Conference_Location :
Dresden
ISSN :
pending
Print_ISBN :
978-1-4577-0503-8
Type :
conf
DOI :
10.1109/IITC.2011.5940300
Filename :
5940300
Link To Document :
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