A fast and simple method to fabricate circular microchannels in polydimethylsiloxane (PDMS)

Author

Abdelgawad, Mohamed ; Wu, Chun ; Chien, Wei-Yin ; Sun, Yu

Author_Institution

Univ. of Toronto, Toronto, ON, Canada

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

1071

Lastpage

1074

Abstract

A coating of liquid PDMS is applied on the walls of square microchannels by introducing a pressurized air stream inside microchannels filled with PDMS. Surface tension of the liquid PDMS makes the coating take a circular cross section which is preserved by baking the device to cure the coated layer. Diameters ranging from a few to few hundred micrometers were achieved. Different coating conditions were systematically tested and design curves are reported to choose appropriate coating conditions for obtaining a desired diameter.

Keywords

curing; microfabrication; microfluidics; polymer films; surface tension; circular cross section; circular microchannels; coated layer curing; coating conditions; design curves; device baking; liquid PDMS coating; polydimethylsiloxane; pressurized air stream; square microchannels; surface tension; Bonding; Cells (biology); Coatings; Etching; Glass; Microchannel; Microfluidics; Resists; Surface tension; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442395

Filename

5442395